Artículo:

Imaging of Arsenic Cottrell Atmospheres Around Silicon Defects by Three-Dimensional Atom Probe Tomography

Autor:

Keith Thompson

Philip L. Flaitz

Paul Ronsheim

David J. Larson

Thomas F. Kelly

Resumen:

Three-dimensional atom probe tomography locates individual dopant atoms and defects inside silicon and shows that the environment around them helps fix their location.

Página:

1370

Sección:

Reports

Publicación:

Science

Volúmen:

317

Número:

5843

Fecha:

07-Sep-07

ISSN:

00368075

SrcID:

00368075-2007-09-07.txt