Artículo:

Applied Physics: Shocks in Ion Sputtering Sharpen Steep Surface Features

Autor:

H. Henry Chen et al.

Resumen:

A theoretical treatment shows how milling surfaces with an ion beam can be optimized to sharpen features as they decrease in size .

Página:

294

Sección:

Reports

Publicación:

Science

Volúmen:

310

Número:

5746

Periodo:

October 14 2005

ISSN:

00368075

SrcID:

00368075-2005-10-14.txt