Número de Documento     
Artículo:

Two Beams Squeeze Feature Sizes in Optical Lithography

Autor:

Joseph W. Perry

Resumen:

Competing activation and deactivation effects with shaped light beams could create in integrated circuit features much smaller than the beams' wavelengths

Página:

892

Publicación:

Science

Volúmen:

324

Número:

5929

Fecha:

15 Mayo 2009

ISSN:

00368075

SrcID:

00368075-2009-05-15.txt

Número de Documento